Investigation of titanium silicide formation using secondary ion mass spectrometry

Investigation of titanium silicide formation using secondary ion mass spectrometry

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Wee, Andrew T.S., Huan, Alfred C.H., Thian, W.H., Tan, K.L., Hogan, Royston
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98769
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Institution: National University of Singapore
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Summary:Materials Research Society Symposium - Proceedings

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