Investigation of titanium silicide formation using secondary ion mass spectrometry
Materials Research Society Symposium - Proceedings
Saved in:
Main Authors: | Wee, Andrew T.S., Huan, Alfred C.H., Thian, W.H., Tan, K.L., Hogan, Royston |
---|---|
Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98769 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Surface and interface studies of titanium silicide formation
by: Wee, A.T.S., et al.
Published: (2014) -
Laser-induced formation of titanium silicides
by: Chen, S.Y., et al.
Published: (2014) -
An investigation of the Ar+ ion-enhanced reaction of CCl4 on Si(100) by secondary ion mass spectrometry
by: Wee, A.T.S., et al.
Published: (2014) -
Effect of degree of amorphization of Si on the formation of titanium silicide
by: Tan, C.C., et al.
Published: (2014) -
Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide
by: Tan, W.L., et al.
Published: (2014)