Effect of ion implantation on layer inversion of Ni silicided poly-Si

Effect of ion implantation on layer inversion of Ni silicided poly-Si

10.1149/1.1494828

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Bibliographic Details
Main Authors: Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chi, D.Z., Osipowicz, T., Dai, J.Y., Chan, L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82202
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/82202

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