Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si lines

Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si lines

10.1149/1.1473192

Saved in:
Bibliographic Details
Main Authors: Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chi, D.Z., Dai, J.Y., Chan, L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82883
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/82883

Similar Items