Formation and stability of Ni(Pt) silicide on(100)Si and (111)Si

by Mangelinck, D., Dai, J.Y., Lahiri, S.K., Ho, C.S., Osipowicz, T.
Published 2014

Integrity of copper-tantalum nitride metallization under different ambient conditions

by Yap, K.P., Gong, H., Dai, J.Y., Osipowicz, T., Chan, L.H., Lahiri, S.K.
Published 2014

Nickel-platinum alloy monosilicidation-induced defects in n-type silicon

by Chi, D.Z., Mangelinck, D., Dai, J.Y., Lahiri, S.K., Pey, K.L., Ho, C.S.
Published 2014

On the Ni–Si phase transformation with/without native oxide

by Mangelinck, D., Dai, J. Y., Ho, C. S., See, A., Lee, Pooi See, Pey, Kin Leong, Ding, Jun
Published 2013

Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation

by Lee, P.S., Mangelinck, D., Pey, K.L., Ding, J., Chi, D.Z., Dai, J.Y., See, A.
Published 2014

Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si lines

by Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chi, D.Z., Dai, J.Y., Chan, L.
Published 2014

Nickel silicide formation on Si(100) and Poly-Si with a presilicide N2 + implantation

by Mangelinck, D., Dai, J. Y., See, A., Lee, Pooi See, Pey, Kin Leong, Ding, Jun, Chi, Dong Zhi
Published 2013

Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si lines

by Mangelinck, D., Dai, J. Y., Chan, L., Ding, Jun, Chi, Dong Zhi, Lee, Pooi See, Pey, Kin Leong
Published 2012

Effect of ion implantation on layer inversion of Ni silicided poly-Si

by Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chi, D.Z., Osipowicz, T., Dai, J.Y., Chan, L.
Published 2014

Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack

by Lee, P.S., Mangelinck, D., Pey, K.L., Ding, J., Chi, D.Z., Osipowicz, T., Dai, J.Y., See, A.
Published 2014

Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack

by Mangelinck, D., Osipowicz, T., Dai, J. Y., See, A., Lee, Pooi See, Pey, Kin Leong, Ding, Jun, Chi, Dong Zhi
Published 2013

Effect of ion implantation on layer inversion of Ni silicided poly-Si

by Mangelinck, D., Osipowicz, T., Dai, J. Y., Chan, L., Lee, Pooi See, Pey, Kin Leong, Ding, Jun, Chi, Dong Zhi
Published 2012

Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions

by Chong, Y.F., Pey, K.L., Lu, Y.F., Wee, A.T.S., Osipowicz, T., Seng, H.L., See, A., Dai, J.-Y.
Published 2014

Effects of first rapid thermal annealing temperature on Co silicide formation

by Peng, H.J., Shen, Z.X., Lim, E.H., Lai, C.W., Liu, R., Wee, A.T.S., Sameer, A., Dai, J.Y., Zhang, B.C., Zheng, J.Z.
Published 2014