Nickel-platinum alloy monosilicidation-induced defects in n-type silicon

Nickel-platinum alloy monosilicidation-induced defects in n-type silicon

Applied Physics Letters

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Bibliographic Details
Main Authors: Chi, D.Z., Mangelinck, D., Dai, J.Y., Lahiri, S.K., Pey, K.L., Ho, C.S.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80816
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/80816

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