Nickel-platinum alloy monosilicidation-induced defects in n-type silicon
Applied Physics Letters
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Main Authors: | Chi, D.Z., Mangelinck, D., Dai, J.Y., Lahiri, S.K., Pey, K.L., Ho, C.S. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80816 |
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Institution: | National University of Singapore |
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