Effect of ion implantation on layer inversion of Ni silicided poly-Si

10.1149/1.1494828

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Bibliographic Details
Main Authors:	Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chi, D.Z., Osipowicz, T., Dai, J.Y., Chan, L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82202
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82202
record_format	dspace
spelling	sg-nus-scholar.10635-822022024-11-13T00:36:33Z Effect of ion implantation on layer inversion of Ni silicided poly-Si Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Chi, D.Z. Osipowicz, T. Dai, J.Y. Chan, L. ELECTRICAL & COMPUTER ENGINEERING PHYSICS MATERIALS SCIENCE 10.1149/1.1494828 Journal of the Electrochemical Society 149 9 G505-G509 JESOA 2014-10-07T04:26:34Z 2014-10-07T04:26:34Z 2002-09 Article Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chi, D.Z., Osipowicz, T., Dai, J.Y., Chan, L. (2002-09). Effect of ion implantation on layer inversion of Ni silicided poly-Si. Journal of the Electrochemical Society 149 (9) : G505-G509. ScholarBank@NUS Repository. https://doi.org/10.1149/1.1494828 00134651 http://scholarbank.nus.edu.sg/handle/10635/82202 000177404600054 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1149/1.1494828
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Chi, D.Z. Osipowicz, T. Dai, J.Y. Chan, L.
format	Article
author	Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Chi, D.Z. Osipowicz, T. Dai, J.Y. Chan, L.
spellingShingle	Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Chi, D.Z. Osipowicz, T. Dai, J.Y. Chan, L. Effect of ion implantation on layer inversion of Ni silicided poly-Si
author_sort	Lee, P.S.
title	Effect of ion implantation on layer inversion of Ni silicided poly-Si
title_short	Effect of ion implantation on layer inversion of Ni silicided poly-Si
title_full	Effect of ion implantation on layer inversion of Ni silicided poly-Si
title_fullStr	Effect of ion implantation on layer inversion of Ni silicided poly-Si
title_full_unstemmed	Effect of ion implantation on layer inversion of Ni silicided poly-Si
title_sort	effect of ion implantation on layer inversion of ni silicided poly-si
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82202
_version_	1821192446209425408

Effect of ion implantation on layer inversion of Ni silicided poly-Si

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