Ionscan: Scanning and control software for proton beam writing

10.1016/j.nimb.2005.01.090

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Main Authors: Bettiol, A.A., Udalagama, C.N.B., Kan, J.A.V., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98772
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-987722024-11-14T01:01:11Z Ionscan: Scanning and control software for proton beam writing Bettiol, A.A. Udalagama, C.N.B. Kan, J.A.V. Watt, F. PHYSICS Beam scanning Proton beam writing Software 10.1016/j.nimb.2005.01.090 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 1-4 400-406 NIMBE 2014-10-16T09:51:14Z 2014-10-16T09:51:14Z 2005-04 Conference Paper Bettiol, A.A., Udalagama, C.N.B., Kan, J.A.V., Watt, F. (2005-04). Ionscan: Scanning and control software for proton beam writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 400-406. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.090 0168583X http://scholarbank.nus.edu.sg/handle/10635/98772 000229752400067 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Beam scanning
Proton beam writing
Software
spellingShingle Beam scanning
Proton beam writing
Software
Bettiol, A.A.
Udalagama, C.N.B.
Kan, J.A.V.
Watt, F.
Ionscan: Scanning and control software for proton beam writing
description 10.1016/j.nimb.2005.01.090
author2 PHYSICS
author_facet PHYSICS
Bettiol, A.A.
Udalagama, C.N.B.
Kan, J.A.V.
Watt, F.
format Conference or Workshop Item
author Bettiol, A.A.
Udalagama, C.N.B.
Kan, J.A.V.
Watt, F.
author_sort Bettiol, A.A.
title Ionscan: Scanning and control software for proton beam writing
title_short Ionscan: Scanning and control software for proton beam writing
title_full Ionscan: Scanning and control software for proton beam writing
title_fullStr Ionscan: Scanning and control software for proton beam writing
title_full_unstemmed Ionscan: Scanning and control software for proton beam writing
title_sort ionscan: scanning and control software for proton beam writing
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/98772
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