Ionscan: Scanning and control software for proton beam writing
10.1016/j.nimb.2005.01.090
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2014
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sg-nus-scholar.10635-987722024-11-14T01:01:11Z Ionscan: Scanning and control software for proton beam writing Bettiol, A.A. Udalagama, C.N.B. Kan, J.A.V. Watt, F. PHYSICS Beam scanning Proton beam writing Software 10.1016/j.nimb.2005.01.090 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 1-4 400-406 NIMBE 2014-10-16T09:51:14Z 2014-10-16T09:51:14Z 2005-04 Conference Paper Bettiol, A.A., Udalagama, C.N.B., Kan, J.A.V., Watt, F. (2005-04). Ionscan: Scanning and control software for proton beam writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 400-406. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.090 0168583X http://scholarbank.nus.edu.sg/handle/10635/98772 000229752400067 Scopus |
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Beam scanning Proton beam writing Software |
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Beam scanning Proton beam writing Software Bettiol, A.A. Udalagama, C.N.B. Kan, J.A.V. Watt, F. Ionscan: Scanning and control software for proton beam writing |
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10.1016/j.nimb.2005.01.090 |
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PHYSICS |
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PHYSICS Bettiol, A.A. Udalagama, C.N.B. Kan, J.A.V. Watt, F. |
format |
Conference or Workshop Item |
author |
Bettiol, A.A. Udalagama, C.N.B. Kan, J.A.V. Watt, F. |
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Bettiol, A.A. |
title |
Ionscan: Scanning and control software for proton beam writing |
title_short |
Ionscan: Scanning and control software for proton beam writing |
title_full |
Ionscan: Scanning and control software for proton beam writing |
title_fullStr |
Ionscan: Scanning and control software for proton beam writing |
title_full_unstemmed |
Ionscan: Scanning and control software for proton beam writing |
title_sort |
ionscan: scanning and control software for proton beam writing |
publishDate |
2014 |
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http://scholarbank.nus.edu.sg/handle/10635/98772 |
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1821198460027666432 |