Ionscan: Scanning and control software for proton beam writing

Ionscan: Scanning and control software for proton beam writing

10.1016/j.nimb.2005.01.090

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Bibliographic Details
Main Authors:	Bettiol, A.A., Udalagama, C.N.B., Kan, J.A.V., Watt, F.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Beam scanning Proton beam writing Software
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98772
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

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