Micro-RBS study of nickel silicide formation
10.1016/S0168-583X(01)00361-5
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2014
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sg-nus-scholar.10635-987992023-10-29T23:14:55Z Micro-RBS study of nickel silicide formation Seng, H.L. Osipowicz, T. Lee, P.S. Mangelinck, D. Sum, T.C. Watt, F. PHYSICS Microbeam Rutherford backscattering (RBS) Silicide 10.1016/S0168-583X(01)00361-5 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 181 1-4 399-403 NIMBE 2014-10-16T09:51:35Z 2014-10-16T09:51:35Z 2001-07 Conference Paper Seng, H.L., Osipowicz, T., Lee, P.S., Mangelinck, D., Sum, T.C., Watt, F. (2001-07). Micro-RBS study of nickel silicide formation. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 181 (1-4) : 399-403. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(01)00361-5 0168583X http://scholarbank.nus.edu.sg/handle/10635/98799 000170885400069 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Microbeam Rutherford backscattering (RBS) Silicide |
| spellingShingle |
Microbeam Rutherford backscattering (RBS) Silicide Seng, H.L. Osipowicz, T. Lee, P.S. Mangelinck, D. Sum, T.C. Watt, F. Micro-RBS study of nickel silicide formation |
| description |
10.1016/S0168-583X(01)00361-5 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Seng, H.L. Osipowicz, T. Lee, P.S. Mangelinck, D. Sum, T.C. Watt, F. |
| format |
Conference or Workshop Item |
| author |
Seng, H.L. Osipowicz, T. Lee, P.S. Mangelinck, D. Sum, T.C. Watt, F. |
| author_sort |
Seng, H.L. |
| title |
Micro-RBS study of nickel silicide formation |
| title_short |
Micro-RBS study of nickel silicide formation |
| title_full |
Micro-RBS study of nickel silicide formation |
| title_fullStr |
Micro-RBS study of nickel silicide formation |
| title_full_unstemmed |
Micro-RBS study of nickel silicide formation |
| title_sort |
micro-rbs study of nickel silicide formation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98799 |
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1781786950786613248 |