Proton beam writing of microstructures in silicon

Proton beam writing of microstructures in silicon

10.1016/j.nimb.2005.01.083

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Bibliographic Details
Main Authors: Breese, M.B.H., Teo, E.J., Mangaiyarkarasi, D., Champeaux, F., Bettiol, A.A., Blackwood, D.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98855
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Institution: National University of Singapore
Description
Summary:10.1016/j.nimb.2005.01.083

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