Proton beam writing of microstructures in silicon

10.1016/j.nimb.2005.01.083

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Bibliographic Details
Main Authors:	Breese, M.B.H., Teo, E.J., Mangaiyarkarasi, D., Champeaux, F., Bettiol, A.A., Blackwood, D.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98855
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98855
record_format	dspace
spelling	sg-nus-scholar.10635-988552023-10-26T08:10:25Z Proton beam writing of microstructures in silicon Breese, M.B.H. Teo, E.J. Mangaiyarkarasi, D. Champeaux, F. Bettiol, A.A. Blackwood, D. PHYSICS MATERIALS SCIENCE 10.1016/j.nimb.2005.01.083 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 1-4 357-363 NIMBE 2014-10-16T09:52:16Z 2014-10-16T09:52:16Z 2005-04 Conference Paper Breese, M.B.H., Teo, E.J., Mangaiyarkarasi, D., Champeaux, F., Bettiol, A.A., Blackwood, D. (2005-04). Proton beam writing of microstructures in silicon. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 357-363. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.083 0168583X http://scholarbank.nus.edu.sg/handle/10635/98855 000229752400060 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1016/j.nimb.2005.01.083
author2	PHYSICS
author_facet	PHYSICS Breese, M.B.H. Teo, E.J. Mangaiyarkarasi, D. Champeaux, F. Bettiol, A.A. Blackwood, D.
format	Conference or Workshop Item
author	Breese, M.B.H. Teo, E.J. Mangaiyarkarasi, D. Champeaux, F. Bettiol, A.A. Blackwood, D.
spellingShingle	Breese, M.B.H. Teo, E.J. Mangaiyarkarasi, D. Champeaux, F. Bettiol, A.A. Blackwood, D. Proton beam writing of microstructures in silicon
author_sort	Breese, M.B.H.
title	Proton beam writing of microstructures in silicon
title_short	Proton beam writing of microstructures in silicon
title_full	Proton beam writing of microstructures in silicon
title_fullStr	Proton beam writing of microstructures in silicon
title_full_unstemmed	Proton beam writing of microstructures in silicon
title_sort	proton beam writing of microstructures in silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98855
_version_	1781786962029445120

Proton beam writing of microstructures in silicon

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