Proton beam writing of microstructures in silicon

• Main Authors: Breese, M.B.H., Teo, E.J., Mangaiyarkarasi, D., Champeaux, F., Bettiol, A.A., Blackwood, D.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98855
• Institution: National University of Singapore

10.1016/j.nimb.2005.01.083