XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)
Materials Research Society Symposium - Proceedings
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| المؤلفون الرئيسيون: | , , , , , , |
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| مؤلفون آخرون: | |
| التنسيق: | Conference or Workshop Item |
| منشور في: |
2014
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| الوصول للمادة أونلاين: | http://scholarbank.nus.edu.sg/handle/10635/98954 |
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| المؤسسة: | National University of Singapore |
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sg-nus-scholar.10635-98954 |
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sg-nus-scholar.10635-989542024-11-13T04:33:20Z XPS and SIMS studies of CVD-grown cubic SiC films on Si(100) Wee, A.T.S. Feng, Z.C. Hng, H.H. Tan, K.L. Tin, C.C. Hu, R. Coston, R. PHYSICS Materials Research Society Symposium - Proceedings 339 411-416 MRSPD 2014-10-16T09:53:27Z 2014-10-16T09:53:27Z 1994 Conference Paper Wee, A.T.S.,Feng, Z.C.,Hng, H.H.,Tan, K.L.,Tin, C.C.,Hu, R.,Coston, R. (1994). XPS and SIMS studies of CVD-grown cubic SiC films on Si(100). Materials Research Society Symposium - Proceedings 339 : 411-416. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/98954 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Materials Research Society Symposium - Proceedings |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Wee, A.T.S. Feng, Z.C. Hng, H.H. Tan, K.L. Tin, C.C. Hu, R. Coston, R. |
| format |
Conference or Workshop Item |
| author |
Wee, A.T.S. Feng, Z.C. Hng, H.H. Tan, K.L. Tin, C.C. Hu, R. Coston, R. |
| spellingShingle |
Wee, A.T.S. Feng, Z.C. Hng, H.H. Tan, K.L. Tin, C.C. Hu, R. Coston, R. XPS and SIMS studies of CVD-grown cubic SiC films on Si(100) |
| author_sort |
Wee, A.T.S. |
| title |
XPS and SIMS studies of CVD-grown cubic SiC films on Si(100) |
| title_short |
XPS and SIMS studies of CVD-grown cubic SiC films on Si(100) |
| title_full |
XPS and SIMS studies of CVD-grown cubic SiC films on Si(100) |
| title_fullStr |
XPS and SIMS studies of CVD-grown cubic SiC films on Si(100) |
| title_full_unstemmed |
XPS and SIMS studies of CVD-grown cubic SiC films on Si(100) |
| title_sort |
xps and sims studies of cvd-grown cubic sic films on si(100) |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98954 |
| _version_ |
1821192248833867776 |