XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)

Materials Research Society Symposium - Proceedings

Saved in:
Bibliographic Details
Main Authors: Wee, A.T.S., Feng, Z.C., Hng, H.H., Tan, K.L., Tin, C.C., Hu, R., Coston, R.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98954
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-98954
record_format dspace
spelling sg-nus-scholar.10635-989542015-01-13T16:34:24Z XPS and SIMS studies of CVD-grown cubic SiC films on Si(100) Wee, A.T.S. Feng, Z.C. Hng, H.H. Tan, K.L. Tin, C.C. Hu, R. Coston, R. PHYSICS Materials Research Society Symposium - Proceedings 339 411-416 MRSPD 2014-10-16T09:53:27Z 2014-10-16T09:53:27Z 1994 Conference Paper Wee, A.T.S.,Feng, Z.C.,Hng, H.H.,Tan, K.L.,Tin, C.C.,Hu, R.,Coston, R. (1994). XPS and SIMS studies of CVD-grown cubic SiC films on Si(100). Materials Research Society Symposium - Proceedings 339 : 411-416. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/98954 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Materials Research Society Symposium - Proceedings
author2 PHYSICS
author_facet PHYSICS
Wee, A.T.S.
Feng, Z.C.
Hng, H.H.
Tan, K.L.
Tin, C.C.
Hu, R.
Coston, R.
format Conference or Workshop Item
author Wee, A.T.S.
Feng, Z.C.
Hng, H.H.
Tan, K.L.
Tin, C.C.
Hu, R.
Coston, R.
spellingShingle Wee, A.T.S.
Feng, Z.C.
Hng, H.H.
Tan, K.L.
Tin, C.C.
Hu, R.
Coston, R.
XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)
author_sort Wee, A.T.S.
title XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)
title_short XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)
title_full XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)
title_fullStr XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)
title_full_unstemmed XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)
title_sort xps and sims studies of cvd-grown cubic sic films on si(100)
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/98954
_version_ 1681092118383165440