XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)

• Main Authors: Wee, A.T.S., Feng, Z.C., Hng, H.H., Tan, K.L., Tin, C.C., Hu, R., Coston, R.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98954
• Institution: National University of Singapore

Materials Research Society Symposium - Proceedings