XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Wee, A.T.S., Feng, Z.C., Hng, H.H., Tan, K.L., Tin, C.C., Hu, R., Coston, R.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98954
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Institution: National University of Singapore

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