XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)

XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)

Materials Research Society Symposium - Proceedings

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書目詳細資料
Main Authors:	Wee, A.T.S., Feng, Z.C., Hng, H.H., Tan, K.L., Tin, C.C., Hu, R., Coston, R.
其他作者:	PHYSICS
格式:	Conference or Workshop Item
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/98954
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

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