Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC

Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC

10.1002/sia.1411

Saved in:
Bibliographic Details
Main Authors: Chang, W., Feng, Z.C., Lin, J., Liu, R., Wee, A.T.S., Tone, K., Zhao, J.H.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
6H-SiC
Annealing
FTIR
Ion implantation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113083
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/113083

Similar Items