Optical characterization of ion-implanted 4H-SiC

Optical characterization of ion-implanted 4H-SiC

Materials Science Forum

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Bibliographic Details
Main Authors: Feng, Z.C., Yan, F., Chang, W.Y., Zhao, J.H., Lin, J.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
4H-SiC
Al-C ions
Annealing
Crystallization
FTIR
Multi-energy implantation
Optical transmission
Photoluminescence
Raman scattering
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97441
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/97441

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