Optical characterization of ion-implanted 4H-SiC

Optical characterization of ion-implanted 4H-SiC

Materials Science Forum

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Bibliographic Details
Main Authors: Feng, Z.C., Yan, F., Chang, W.Y., Zhao, J.H., Lin, J.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
4H-SiC
Al-C ions
Annealing
Crystallization
FTIR
Multi-energy implantation
Optical transmission
Photoluminescence
Raman scattering
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97441
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Institution: National University of Singapore
id sg-nus-scholar.10635-97441
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spelling sg-nus-scholar.10635-974412024-11-13T13:30:46Z Optical characterization of ion-implanted 4H-SiC Feng, Z.C. Yan, F. Chang, W.Y. Zhao, J.H. Lin, J. PHYSICS 4H-SiC Al-C ions Annealing Crystallization FTIR Multi-energy implantation Optical transmission Photoluminescence Raman scattering Materials Science Forum 389-393 1 647-650 MSFOE 2014-10-16T09:35:19Z 2014-10-16T09:35:19Z 2002 Article Feng, Z.C.,Yan, F.,Chang, W.Y.,Zhao, J.H.,Lin, J. (2002). Optical characterization of ion-implanted 4H-SiC. Materials Science Forum 389-393 (1) : 647-650. ScholarBank@NUS Repository. 02555476 http://scholarbank.nus.edu.sg/handle/10635/97441 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic 4H-SiC
Al-C ions
Annealing
Crystallization
FTIR
Multi-energy implantation
Optical transmission
Photoluminescence
Raman scattering
spellingShingle 4H-SiC
Al-C ions
Annealing
Crystallization
FTIR
Multi-energy implantation
Optical transmission
Photoluminescence
Raman scattering
Feng, Z.C.
Yan, F.
Chang, W.Y.
Zhao, J.H.
Lin, J.
Optical characterization of ion-implanted 4H-SiC
description Materials Science Forum
author2 PHYSICS
author_facet PHYSICS
Feng, Z.C.
Yan, F.
Chang, W.Y.
Zhao, J.H.
Lin, J.
format Article
author Feng, Z.C.
Yan, F.
Chang, W.Y.
Zhao, J.H.
Lin, J.
author_sort Feng, Z.C.
title Optical characterization of ion-implanted 4H-SiC
title_short Optical characterization of ion-implanted 4H-SiC
title_full Optical characterization of ion-implanted 4H-SiC
title_fullStr Optical characterization of ion-implanted 4H-SiC
title_full_unstemmed Optical characterization of ion-implanted 4H-SiC
title_sort optical characterization of ion-implanted 4h-sic
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/97441
_version_ 1821214417044373504

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