Optical characterization of ion-implanted 4H-SiC

Materials Science Forum

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Bibliographic Details
Main Authors:	Feng, Z.C., Yan, F., Chang, W.Y., Zhao, J.H., Lin, J.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	4H-SiC Al-C ions Annealing Crystallization FTIR Multi-energy implantation Optical transmission Photoluminescence Raman scattering
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97441
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Institution:	National University of Singapore

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