Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC
10.1002/sia.1411
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2014
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sg-nus-scholar.10635-1130832023-10-26T21:27:51Z Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC Chang, W. Feng, Z.C. Lin, J. Liu, R. Wee, A.T.S. Tone, K. Zhao, J.H. PHYSICS INSTITUTE OF ENGINEERING SCIENCE 6H-SiC Annealing FTIR Ion implantation 10.1002/sia.1411 Surface and Interface Analysis 33 6 500-505 SIAND 2014-11-28T09:11:48Z 2014-11-28T09:11:48Z 2002-06 Article Chang, W., Feng, Z.C., Lin, J., Liu, R., Wee, A.T.S., Tone, K., Zhao, J.H. (2002-06). Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC. Surface and Interface Analysis 33 (6) : 500-505. ScholarBank@NUS Repository. https://doi.org/10.1002/sia.1411 01422421 http://scholarbank.nus.edu.sg/handle/10635/113083 000176481600007 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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6H-SiC Annealing FTIR Ion implantation |
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6H-SiC Annealing FTIR Ion implantation Chang, W. Feng, Z.C. Lin, J. Liu, R. Wee, A.T.S. Tone, K. Zhao, J.H. Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC |
| description |
10.1002/sia.1411 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Chang, W. Feng, Z.C. Lin, J. Liu, R. Wee, A.T.S. Tone, K. Zhao, J.H. |
| format |
Article |
| author |
Chang, W. Feng, Z.C. Lin, J. Liu, R. Wee, A.T.S. Tone, K. Zhao, J.H. |
| author_sort |
Chang, W. |
| title |
Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC |
| title_short |
Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC |
| title_full |
Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC |
| title_fullStr |
Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC |
| title_full_unstemmed |
Infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6H-SiC |
| title_sort |
infrared reflection investigation of ion-implanted and post-implantation-annealed epitaxially grown 6h-sic |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113083 |
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1781789163736006656 |