Three-dimensional silicon micromachining
10.1088/0960-1317/22/11/113001
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2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/99032 |
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sg-nus-scholar.10635-990322023-10-29T23:22:09Z Three-dimensional silicon micromachining Azimi, S. Song, J. Dang, Z.Y. Liang, H.D. Breese, M.B.H. PHYSICS 10.1088/0960-1317/22/11/113001 Journal of Micromechanics and Microengineering 22 11 - JMMIE 2014-10-16T09:54:21Z 2014-10-16T09:54:21Z 2012-11 Review Azimi, S., Song, J., Dang, Z.Y., Liang, H.D., Breese, M.B.H. (2012-11). Three-dimensional silicon micromachining. Journal of Micromechanics and Microengineering 22 (11) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/22/11/113001 09601317 http://scholarbank.nus.edu.sg/handle/10635/99032 000310534400001 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1088/0960-1317/22/11/113001 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Azimi, S. Song, J. Dang, Z.Y. Liang, H.D. Breese, M.B.H. |
| format |
Review |
| author |
Azimi, S. Song, J. Dang, Z.Y. Liang, H.D. Breese, M.B.H. |
| spellingShingle |
Azimi, S. Song, J. Dang, Z.Y. Liang, H.D. Breese, M.B.H. Three-dimensional silicon micromachining |
| author_sort |
Azimi, S. |
| title |
Three-dimensional silicon micromachining |
| title_short |
Three-dimensional silicon micromachining |
| title_full |
Three-dimensional silicon micromachining |
| title_fullStr |
Three-dimensional silicon micromachining |
| title_full_unstemmed |
Three-dimensional silicon micromachining |
| title_sort |
three-dimensional silicon micromachining |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/99032 |
| _version_ |
1781786992911056896 |