Three-dimensional silicon micromachining

Three-dimensional silicon micromachining

10.1088/0960-1317/22/11/113001

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Bibliographic Details
Main Authors:	Azimi, S., Song, J., Dang, Z.Y., Liang, H.D., Breese, M.B.H.
Other Authors:	PHYSICS
Format:	Review
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/99032
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Institution:	National University of Singapore

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