Mathematical models in integrated-circuit manufacturing: A review

• المؤلفون الرئيسيون: TANG, Christopher S., DEMEESTER, Lieven
• التنسيق: text
• اللغة: English
• منشور في: Institutional Knowledge at Singapore Management University 1993
• الموضوعات: Wafer fabrication; machine failures; integrated circuits; Operations and Supply Chain Management; Operations Research, Systems Engineering and Industrial Engineering
• الوصول للمادة أونلاين: https://ink.library.smu.edu.sg/lkcsb_research/1065; https://doi.org/10.1007/978-1-4615-3166-1_20
• المؤسسة: Singapore Management University

In this paper, we review mathematical models that have been developed for improving the performance of a wafer fab that faces yield uncertainty and system uncertainty such as machine failures. Specifically, we focus on models that deal with the design and operational issues arising from a wafer fab....