Vertically Coupled Microring Laser Devices based on InP using BCB Wafer Bonding

• Main Authors: Hamacher, M., Heidrich, H., Troppenz, U., Syvridis, D., Alexandropoulos, D., Mikroulis, S., Kapsalis, A., TEE, Chyng Wen, Williams, K. A., Dragoi, V., Alexe, M., Cristea, D., Kusko, M.
• Format: text
• Language: English
• Published: Institutional Knowledge at Singapore Management University 2007
• Subjects: Costs; Epitaxial growth; Indium phosphide; Optical coupling; Optical device fabrication; Optical resonators; Optical waveguides; Resonator filters; Ring lasers; Waveguide lasers; Physical Sciences and Mathematics
• Online Access: https://ink.library.smu.edu.sg/lkcsb_research/3358; https://ink.library.smu.edu.sg/context/lkcsb_research/article/4357/viewcontent/Waferbonded_ActivePassive_Vertically_Coupled_Micro.pdf
• Institution: Singapore Management University

In this paper, we present our approach on the realization of vertical coupling technology that has been verified for microlaser fabrication as well as for the realization of high Q resonators with 'loss-less' cavities based on InP. The concept is based on full wafer technology and provides...