Patterning of burnishing head for hard disk platters by synchrotron radiation lithography
This paper discusses the patterning of the burnishing head for hard disk platters on the AlTiC substrate, performed by X-ray exposure through X-ray mask to identify areas still left on the substrate after the photoresist development. The high energy and the low divergence of the synchrotron light pr...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84901575623&partnerID=40&md5=97068e35bb6d54253afb50051e516aa7 http://cmuir.cmu.ac.th/handle/6653943832/1250 |
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| Institution: | Chiang Mai University |
| Language: | English |