Patterning of burnishing head for hard disk platters by synchrotron radiation lithography
© Springer-Verlag Berlin Heidelberg 2014. This paper discusses the patterning of the burnishing head for hard disk platters on the AlTiC substrate, performed by X-ray exposure through X-ray mask to identify areas still left on the substrate after the photoresist development. The high energy and the...
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| Main Authors: | , , |
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| Format: | Journal |
| Published: |
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85027935856&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/45069 |
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| Institution: | Chiang Mai University |