Central composite designs coupled with simulation techniques for optimizing RIE process
This research paper develops an effective methodology to determine the optimum etching conditions for slider fabrication that meet hard disk drive (HDD) industrial targets using a reactive ion etching (RIE) machine of central composite design (CCD), coupled with RIE simulation. CCD is utilized to cr...
Saved in:
| Main Authors: | , |
|---|---|
| 格式: | Article |
| 語言: | English |
| 出版: |
2014
|
| 在線閱讀: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84896731284&partnerID=40&md5=1e413254f7ac3ab72261d0b925f23bee http://cmuir.cmu.ac.th/handle/6653943832/1655 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | Chiang Mai University |
| 語言: | English |