Central composite designs coupled with simulation techniques for optimizing RIE process

This research paper develops an effective methodology to determine the optimum etching conditions for slider fabrication that meet hard disk drive (HDD) industrial targets using a reactive ion etching (RIE) machine of central composite design (CCD), coupled with RIE simulation. CCD is utilized to cr...

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Bibliographic Details
Main Authors: Komgrit Leksakul, Alonggot Limcharoen
Format: Journal
Published: 2018
Subjects:
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84896731284&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/53383
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Institution: Chiang Mai University