Central composite designs coupled with simulation techniques for optimizing RIE process
This research paper develops an effective methodology to determine the optimum etching conditions for slider fabrication that meet hard disk drive (HDD) industrial targets using a reactive ion etching (RIE) machine of central composite design (CCD), coupled with RIE simulation. CCD is utilized to cr...
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| Main Authors: | , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84896731284&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/53383 |
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| Institution: | Chiang Mai University |