Central composite designs coupled with simulation techniques for optimizing RIE process

This research paper develops an effective methodology to determine the optimum etching conditions for slider fabrication that meet hard disk drive (HDD) industrial targets using a reactive ion etching (RIE) machine of central composite design (CCD), coupled with RIE simulation. CCD is utilized to cr...

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Main Authors: Leksakul K., Limcharoen A.
Format: Article
Language:English
Published: 2014
Online Access:http://www.scopus.com/inward/record.url?eid=2-s2.0-84896731284&partnerID=40&md5=1e413254f7ac3ab72261d0b925f23bee
http://cmuir.cmu.ac.th/handle/6653943832/1655
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Institution: Chiang Mai University
Language: English
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spelling th-cmuir.6653943832-16552014-08-29T09:29:34Z Central composite designs coupled with simulation techniques for optimizing RIE process Leksakul K. Limcharoen A. This research paper develops an effective methodology to determine the optimum etching conditions for slider fabrication that meet hard disk drive (HDD) industrial targets using a reactive ion etching (RIE) machine of central composite design (CCD), coupled with RIE simulation. CCD is utilized to create an efficient analytical model for multi-response incorporating the RIE process parameters of pressure and coil and platen power. The research first determined the factors that cause production defects, using the design of experiments (DOE) method. Then, the most promising production parameters were selected. To optimize the parameters, an efficient CCD technique was proposed. Unfortunately, the CCD technique generated a large number of experimental combinations, leading to prohibitively high experimental costs. Simulation application software was used as a cost-efficient alternative, although RIE simulation and actual process parameters differ. Mathematical equations showing the parameter relationships were formulated. CCD interfaced with RIE simulation was further applied to find the optimal conditions for multi-responses. Finally, the optimal conditions obtained by desirability optimization technique were verified with experimental results and found to agree with HDD industrial standards. © 2013 Springer-Verlag London. 2014-08-29T09:29:34Z 2014-08-29T09:29:34Z 2014 Article 02683768 10.1007/s00170-013-5374-2 IJATE http://www.scopus.com/inward/record.url?eid=2-s2.0-84896731284&partnerID=40&md5=1e413254f7ac3ab72261d0b925f23bee http://cmuir.cmu.ac.th/handle/6653943832/1655 English
institution Chiang Mai University
building Chiang Mai University Library
country Thailand
collection CMU Intellectual Repository
language English
description This research paper develops an effective methodology to determine the optimum etching conditions for slider fabrication that meet hard disk drive (HDD) industrial targets using a reactive ion etching (RIE) machine of central composite design (CCD), coupled with RIE simulation. CCD is utilized to create an efficient analytical model for multi-response incorporating the RIE process parameters of pressure and coil and platen power. The research first determined the factors that cause production defects, using the design of experiments (DOE) method. Then, the most promising production parameters were selected. To optimize the parameters, an efficient CCD technique was proposed. Unfortunately, the CCD technique generated a large number of experimental combinations, leading to prohibitively high experimental costs. Simulation application software was used as a cost-efficient alternative, although RIE simulation and actual process parameters differ. Mathematical equations showing the parameter relationships were formulated. CCD interfaced with RIE simulation was further applied to find the optimal conditions for multi-responses. Finally, the optimal conditions obtained by desirability optimization technique were verified with experimental results and found to agree with HDD industrial standards. © 2013 Springer-Verlag London.
format Article
author Leksakul K.
Limcharoen A.
spellingShingle Leksakul K.
Limcharoen A.
Central composite designs coupled with simulation techniques for optimizing RIE process
author_facet Leksakul K.
Limcharoen A.
author_sort Leksakul K.
title Central composite designs coupled with simulation techniques for optimizing RIE process
title_short Central composite designs coupled with simulation techniques for optimizing RIE process
title_full Central composite designs coupled with simulation techniques for optimizing RIE process
title_fullStr Central composite designs coupled with simulation techniques for optimizing RIE process
title_full_unstemmed Central composite designs coupled with simulation techniques for optimizing RIE process
title_sort central composite designs coupled with simulation techniques for optimizing rie process
publishDate 2014
url http://www.scopus.com/inward/record.url?eid=2-s2.0-84896731284&partnerID=40&md5=1e413254f7ac3ab72261d0b925f23bee
http://cmuir.cmu.ac.th/handle/6653943832/1655
_version_ 1681419710958141440