Deep reactive ion etching of alumina titanium carbide using chlorine-based plasma

© 2016 Elsevier B.V. Al 2 O 3 -TiC (AlTiC) burnish head is widely used in hard disk drive manufacturing process to smoothen magnetic media surface produced from metal deposition process. Vertical etched wall of air bearing surface burnish head is ideal fabrication target since it provides fly height...

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Bibliographic Details
Main Authors: Pakpum C., Pussadee N.
Format: Journal
Published: 2017
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84971597351&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/41323
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Institution: Chiang Mai University