Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties
In this work we present the influence of carrier gases in the deposition of low-pressure discharge plasma of hexamethyldisiloxane (HMDSO). Plasma polymerized HMDSO films were deposited with an inductively-coupled discharge reactor using Ar and O 2 as carrier gases. The films deposited in Ar containe...
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| Main Authors: | , , , |
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| Format: | Journal |
| Published: |
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84880571045&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/47708 |
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| Institution: | Chiang Mai University |