Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties
In this work we present the influence of carrier gases in the deposition of low-pressure discharge plasma of hexamethyldisiloxane (HMDSO). Plasma polymerized HMDSO films were deposited with an inductively-coupled discharge reactor using Ar and O 2 as carrier gases. The films deposited in Ar containe...
Saved in:
| Main Authors: | , , , |
|---|---|
| 格式: | 雜誌 |
| 出版: |
2018
|
| 在線閱讀: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84880571045&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/47708 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | Chiang Mai University |