Preparation of titanium-doped indium oxide films by ultrasonic spray pyrolysis method
Titanium-doped indium oxide (ITiO) films were deposited on soda-lime glass by ultrasonic spray pyrolysis. The optimum conditions of deposition parameters, such as dopant concentration for lowest resistivity were investigated. Phase formation and microstructure of the films were examined by XRD and S...
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Main Authors: | , , , , , |
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Format: | Journal |
Published: |
2018
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Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84891765557&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/48250 |
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Institution: | Chiang Mai University |