Preparation of titanium-doped indium oxide films by ultrasonic spray pyrolysis method

Titanium-doped indium oxide (ITiO) films were deposited on soda-lime glass by ultrasonic spray pyrolysis. The optimum conditions of deposition parameters, such as dopant concentration for lowest resistivity were investigated. Phase formation and microstructure of the films were examined by XRD and S...

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Bibliographic Details
Main Authors: Panyata S., Eitssayeam S., Rujijanagul G., Tunkasiri T., Sirisoonthorn S., Pengpat K.
Format: Article
Language:English
Published: 2014
Online Access:http://www.scopus.com/inward/record.url?eid=2-s2.0-84891765557&partnerID=40&md5=708adc522fb61d7afd10ab582c85bd20
http://cmuir.cmu.ac.th/handle/6653943832/7308
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Institution: Chiang Mai University
Language: English