Preparation of titanium-doped indium oxide films by ultrasonic spray pyrolysis method

Titanium-doped indium oxide (ITiO) films were deposited on soda-lime glass by ultrasonic spray pyrolysis. The optimum conditions of deposition parameters, such as dopant concentration for lowest resistivity were investigated. Phase formation and microstructure of the films were examined by XRD and S...

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Main Authors: Surapong Panyata, Sukum Eitssayeam, Gobwut Rujijanagul, Tawee Tunkasiri, Sumnuk Sirisoonthorn, Kamonpan Pengpat
格式: 雜誌
出版: 2018
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在線閱讀:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84891765557&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/52700
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機構: Chiang Mai University