Preparation of titanium-doped indium oxide films by ultrasonic spray pyrolysis method

Titanium-doped indium oxide (ITiO) films were deposited on soda-lime glass by ultrasonic spray pyrolysis. The optimum conditions of deposition parameters, such as dopant concentration for lowest resistivity were investigated. Phase formation and microstructure of the films were examined by XRD and S...

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Bibliographic Details
Main Authors: Surapong Panyata, Sukum Eitssayeam, Gobwut Rujijanagul, Tawee Tunkasiri, Sumnuk Sirisoonthorn, Kamonpan Pengpat
Format: Journal
Published: 2018
Subjects:
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84891765557&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/52700
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Institution: Chiang Mai University