A self-DLC coated cathode plasma source
A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathod...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Journal |
| Published: |
2018
|
| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=67349127573&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/48979 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Chiang Mai University |
| id |
th-cmuir.6653943832-48979 |
|---|---|
| record_format |
dspace |
| spelling |
th-cmuir.6653943832-489792018-08-16T02:18:07Z A self-DLC coated cathode plasma source A. Deachana D. Boonyawan B. Yodsombat Chemistry Materials Science Physics and Astronomy A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathode for plasma density enhancement were investigated. DLC-Al cathodes coating by self cathode of microwave plasma source were fabricated to control and yielded strong non-activated emission. The novel cathodes showed enhancement of current density up to 240%. In addition, the contamination in the plasma source could be avoided with the new cathodes. Crown Copyright © 2009. 2018-08-16T02:07:35Z 2018-08-16T02:07:35Z 2009-06-15 Journal 02578972 2-s2.0-67349127573 10.1016/j.surfcoat.2009.02.132 https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=67349127573&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/48979 |
| institution |
Chiang Mai University |
| building |
Chiang Mai University Library |
| country |
Thailand |
| collection |
CMU Intellectual Repository |
| topic |
Chemistry Materials Science Physics and Astronomy |
| spellingShingle |
Chemistry Materials Science Physics and Astronomy A. Deachana D. Boonyawan B. Yodsombat A self-DLC coated cathode plasma source |
| description |
A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathode for plasma density enhancement were investigated. DLC-Al cathodes coating by self cathode of microwave plasma source were fabricated to control and yielded strong non-activated emission. The novel cathodes showed enhancement of current density up to 240%. In addition, the contamination in the plasma source could be avoided with the new cathodes. Crown Copyright © 2009. |
| format |
Journal |
| author |
A. Deachana D. Boonyawan B. Yodsombat |
| author_facet |
A. Deachana D. Boonyawan B. Yodsombat |
| author_sort |
A. Deachana |
| title |
A self-DLC coated cathode plasma source |
| title_short |
A self-DLC coated cathode plasma source |
| title_full |
A self-DLC coated cathode plasma source |
| title_fullStr |
A self-DLC coated cathode plasma source |
| title_full_unstemmed |
A self-DLC coated cathode plasma source |
| title_sort |
self-dlc coated cathode plasma source |
| publishDate |
2018 |
| url |
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=67349127573&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/48979 |
| _version_ |
1681423327587991552 |