A self-DLC coated cathode plasma source
A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathod...
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| Main Authors: | , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=67349127573&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/48979 |
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| Institution: | Chiang Mai University |