Formation of thin DLC films on SiO<inf>2</inf>/Si substrate using FCVAD technique

• المؤلفون الرئيسيون: D. Bootkul, S. Intarasiri, C. Aramwit, U. Tippawan, L. D. Yu
• التنسيق: دورية
• منشور في: 2018
• الموضوعات: Physics and Astronomy
• الوصول للمادة أونلاين: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84885191214&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/52988

Diamond-like carbon (DLC) films deposited on SiO2/Si substrate are attractive for novel sensitive and selective chemical sensors. According to the almost never ending of size reduction, a nm-thickness layer of the film is greatly required. However, formation of such a very thin DLC film on SiO2/Si s...