Formation of thin DLC films on SiO<inf>2</inf>/Si substrate using FCVAD technique
Diamond-like carbon (DLC) films deposited on SiO2/Si substrate are attractive for novel sensitive and selective chemical sensors. According to the almost never ending of size reduction, a nm-thickness layer of the film is greatly required. However, formation of such a very thin DLC film on SiO2/Si s...
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| Main Authors: | , , , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84885191214&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/52988 |
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| Institution: | Chiang Mai University |