Novel Spark Method for Deposition of Metal Oxide Thin Films: Deposition of Hexagonal Tungsten Oxide
© 2019 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Hexagonal tungsten trioxide (WO3) layers are grown on indium tin oxide (ITO) substrates using a novel spark deposition system. The effects of deposition time, substrate temperature, and oxygen (O2) flow rate through the chamber on the structura...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| 格式: | 雜誌 |
| 出版: |
2019
|
| 主題: | |
| 在線閱讀: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85059700459&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/63655 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | Chiang Mai University |