Novel Spark Method for Deposition of Metal Oxide Thin Films: Deposition of Hexagonal Tungsten Oxide

Novel Spark Method for Deposition of Metal Oxide Thin Films: Deposition of Hexagonal Tungsten Oxide

© 2019 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Hexagonal tungsten trioxide (WO3) layers are grown on indium tin oxide (ITO) substrates using a novel spark deposition system. The effects of deposition time, substrate temperature, and oxygen (O2) flow rate through the chamber on the structura...

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Bibliographic Details
Main Authors: Dimitrios Louloudakis, Winai Thongpan, Kyriakos Mouratis, Emmanouel Koudoumas, George Kiriakidis, Pisith Singjai
Format: Journal
Published: 2019
Subjects:
Engineering
Materials Science
Physics and Astronomy
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85059700459&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/63655
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Institution: Chiang Mai University

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https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85059700459&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/63655

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