Novel Spark Method for Deposition of Metal Oxide Thin Films: Deposition of Hexagonal Tungsten Oxide

• Main Authors: Dimitrios Louloudakis, Winai Thongpan, Kyriakos Mouratis, Emmanouel Koudoumas, George Kiriakidis, Pisith Singjai
• Format: Journal
• Published: 2019
• Subjects: Engineering; Materials Science; Physics and Astronomy
• Online Access: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85059700459&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/63655
• Institution: Chiang Mai University

© 2019 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Hexagonal tungsten trioxide (WO3) layers are grown on indium tin oxide (ITO) substrates using a novel spark deposition system. The effects of deposition time, substrate temperature, and oxygen (O2) flow rate through the chamber on the structura...