Novel Spark Method for Deposition of Metal Oxide Thin Films: Deposition of Hexagonal Tungsten Oxide
© 2019 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Hexagonal tungsten trioxide (WO3) layers are grown on indium tin oxide (ITO) substrates using a novel spark deposition system. The effects of deposition time, substrate temperature, and oxygen (O2) flow rate through the chamber on the structura...
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| Main Authors: | , , , , , |
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| Format: | Journal |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85059700459&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/63655 |
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| Institution: | Chiang Mai University |