Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films

Polytetrafluoroethylene (PTFE) thin films were prepared by rf magnetron sputtering in argon plasma. The effects of rf power (10 to 100 W) on the chemical and physical structures of PTFE thin films were studied. X-ray photoelectron spectroscopy (XPS) results showed that small amounts of CF3 (1.75%) w...

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Main Authors: Nopporn Rujisamphan, Roy E. Murray, S. Ismat Shah, Thidarat Supasai
Format: บทความวารสาร
Language:English
Published: Science Faculty of Chiang Mai University 2019
Online Access:http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=8038
http://cmuir.cmu.ac.th/jspui/handle/6653943832/63894
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Institution: Chiang Mai University
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spelling th-cmuir.6653943832-638942019-05-07T09:59:37Z Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films Nopporn Rujisamphan Roy E. Murray S. Ismat Shah Thidarat Supasai Polytetrafluoroethylene (PTFE) thin films were prepared by rf magnetron sputtering in argon plasma. The effects of rf power (10 to 100 W) on the chemical and physical structures of PTFE thin films were studied. X-ray photoelectron spectroscopy (XPS) results showed that small amounts of CF3 (1.75%) were observed at rf power of 10 W. At increased rf power (25-100 W), the intensities of CF2 and C-CF groups dramatically increased accompanied with water contact angle increasing from 78° to 87°. The atomic ratio of fluorine and carbon (F/C) increases from 0.36 to 1.65 with increasing rf power. Fourier transform infrared spectroscopy (FTIR) results showed the overlap of asymmetric and symmetric stretching of CF2 at all rf powers, while the C=C bonding was clearly visible at rf powers from 25 to 100 W. All PTFE thin films showed an amorphous structure and were colorless with almost 93 percent transmittance in visible wavelength. 2019-05-07T09:59:37Z 2019-05-07T09:59:37Z 2017 บทความวารสาร 0125-2526 http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=8038 http://cmuir.cmu.ac.th/jspui/handle/6653943832/63894 Eng Science Faculty of Chiang Mai University
institution Chiang Mai University
building Chiang Mai University Library
country Thailand
collection CMU Intellectual Repository
language English
description Polytetrafluoroethylene (PTFE) thin films were prepared by rf magnetron sputtering in argon plasma. The effects of rf power (10 to 100 W) on the chemical and physical structures of PTFE thin films were studied. X-ray photoelectron spectroscopy (XPS) results showed that small amounts of CF3 (1.75%) were observed at rf power of 10 W. At increased rf power (25-100 W), the intensities of CF2 and C-CF groups dramatically increased accompanied with water contact angle increasing from 78° to 87°. The atomic ratio of fluorine and carbon (F/C) increases from 0.36 to 1.65 with increasing rf power. Fourier transform infrared spectroscopy (FTIR) results showed the overlap of asymmetric and symmetric stretching of CF2 at all rf powers, while the C=C bonding was clearly visible at rf powers from 25 to 100 W. All PTFE thin films showed an amorphous structure and were colorless with almost 93 percent transmittance in visible wavelength.
format บทความวารสาร
author Nopporn Rujisamphan
Roy E. Murray
S. Ismat Shah
Thidarat Supasai
spellingShingle Nopporn Rujisamphan
Roy E. Murray
S. Ismat Shah
Thidarat Supasai
Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films
author_facet Nopporn Rujisamphan
Roy E. Murray
S. Ismat Shah
Thidarat Supasai
author_sort Nopporn Rujisamphan
title Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films
title_short Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films
title_full Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films
title_fullStr Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films
title_full_unstemmed Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films
title_sort effects of rf power on chemical and physical structure of polytetrafluoroethylene thin films
publisher Science Faculty of Chiang Mai University
publishDate 2019
url http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=8038
http://cmuir.cmu.ac.th/jspui/handle/6653943832/63894
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