Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films

Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films

Polytetrafluoroethylene (PTFE) thin films were prepared by rf magnetron sputtering in argon plasma. The effects of rf power (10 to 100 W) on the chemical and physical structures of PTFE thin films were studied. X-ray photoelectron spectroscopy (XPS) results showed that small amounts of CF3 (1.75%) w...

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書目詳細資料
Main Authors:	Nopporn Rujisamphan, Roy E. Murray, S. Ismat Shah, Thidarat Supasai
格式:	บทความวารสาร
語言:	English
出版:	Science Faculty of Chiang Mai University 2019
在線閱讀:	http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=8038 http://cmuir.cmu.ac.th/jspui/handle/6653943832/63894
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Chiang Mai University
語言:	English

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