Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films
Polytetrafluoroethylene (PTFE) thin films were prepared by rf magnetron sputtering in argon plasma. The effects of rf power (10 to 100 W) on the chemical and physical structures of PTFE thin films were studied. X-ray photoelectron spectroscopy (XPS) results showed that small amounts of CF3 (1.75%) w...
Saved in:
Main Authors: | , , , |
---|---|
Format: | บทความวารสาร |
Language: | English |
Published: |
Science Faculty of Chiang Mai University
2019
|
Online Access: | http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=8038 http://cmuir.cmu.ac.th/jspui/handle/6653943832/63894 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Chiang Mai University |
Language: | English |
Be the first to leave a comment!