Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films

Polytetrafluoroethylene (PTFE) thin films were prepared by rf magnetron sputtering in argon plasma. The effects of rf power (10 to 100 W) on the chemical and physical structures of PTFE thin films were studied. X-ray photoelectron spectroscopy (XPS) results showed that small amounts of CF3 (1.75%) w...

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Bibliographic Details
Main Authors: Nopporn Rujisamphan, Roy E. Murray, S. Ismat Shah, Thidarat Supasai
Format: บทความวารสาร
Language:English
Published: Science Faculty of Chiang Mai University 2019
Online Access:http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=8038
http://cmuir.cmu.ac.th/jspui/handle/6653943832/63894
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Institution: Chiang Mai University
Language: English
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