Spectroscopic electron temperature measurement in methane/helium plasma during diamond-like carbon coating
The electron temperature () was extracted from the capacitively-coupled radio frequency (CCRF) plasma reactor by the spectral line intensity ratio method. The measured intensity ratio of 587.6/706.5 nm from CH4/He plasma was used to calculate the electron temperature under the steady state corona (S...
Saved in:
| Main Authors: | , |
|---|---|
| 語言: | English |
| 出版: |
Science Faculty of Chiang Mai University
2019
|
| 主題: | |
| 在線閱讀: | http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=5521 http://cmuir.cmu.ac.th/jspui/handle/6653943832/66760 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | Chiang Mai University |
| 語言: | English |